Getting the Groove into Silicone – Let Light Do the Job
نویسندگان
چکیده
Patterned deep UV-irradiation of cured polydimethylsiloxane (PDMS) followed by wet-chemical etching is a convenient method to create microstructures in this material with structural depths up to 10 μm. The intrinsic elasticity of many polydimethylsiloxanes allows the introduction of a new parameter influencing the patterning process: elongation. Symmetric stretching during the irradiation, subsequent release and development results in smaller and deeper structures as compared to the conventional approach without dilatation. Asymmetric elongation also allows for the creation of more complex patterns.
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